SMC Components for the Semiconductor Industry
In semiconductor manufacturing processes, etching equipment, sputtering equipment, ion implantation equipment, and CVD equipment generally process wafers in a vacuum chamber. Precision equipment is needed to exhaust air from and supply atmospheric pressure to the vacuum chamber. High quality SMC products such as valves, regulators, pressure switches, cylinders and gate valves meet strict requirements such as nonleakage, clean specification, and corrosion resistance.
The featured products below are categorized for reference under: N2 Gas/Air Supply Line, Cooling Water & Temperature Control Line, Transfer Line, Process Chamber Exhaust Line, and the Load-Lock Chamber Exhaust Line.
N₂Gas/Air Supply Line
SF Clean Gas Filter
SF series clean air filters are available as cartridge type or disposable type models. The filtration level is 0.01 micron (filtering efficiency of 99.99%) on units with membrane elements. The SFB20, with a sintered metallic element, has a nominal filtration of 120 micron. The SF series can be used under different environments with chemical resistant and heat resistant materials (refer to catalog specifications for each series).
SRH Clean Regulator
Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.
PF2A Digital Flow Switch
PF2A7 is a digital flow sensor compatible with air and nitrogen. This is a legacy sensor, with refreshed feature sets offered by the newer PFMB and PFMC sensors. The 3-digit LED display can show either instantaneous or accumulated flow. The mounting bracket is integrated into the body, while the M12 lead wire is optional. 2 switch outputs are included, with an LED indicator for each located below the display. PF2A is IP65 rated, and CE and RoHS compliant.
XVD2 Smooth Vent Valve
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).
The N2 gas or air supplied to a vacuum chamber to restore atmospheric pressure upon wafer introduction must have a high degree of cleanliness. At the entrance of the chamber, the flow is rectified with a SF series clean gas filter (with 100% filtration efficiency of 0.01 µm particles) and a stainless steel diffusion element inside the chamber. The SRH clean regulator provides a constant pressure and the PF2A flow switch enables precise flow control, both with outstanding corrosion resistance for optimal contamination control. The XVD2 smooth vent valve is used to change the flow rate of the N2 or clean air, which is supplied slowly at the initial stage after opening, and on achieving a certain pressure, is switched to the main valve for a full supply to prevent particle turbulence.
Cooling Water & Temperature Control Line
VDW / VX2 Process Valves
Solenoid control valves are good for general purpose use. Direct acting poppet valves available in normally closed and normally open varieties. Available in a varietey of materials including resin, aluminum, brass and stainless steel.
PF3W Digital Flow Switch
Liquid flow sensors with buttons and a display to set and read values from an operator's position.
ISE80 Pressure Switch
ISE80(H) is a digital pressure sensor with a 4 digit, 2 color display, compatible with both compressed air and non-corrosive liquids. Instantaneous readings are shown in red or green, or shifted from one to the other to alert reaching a target condition. Switch outputs are also indicated on the display. Additional functions include security, power saving, resolution and stability. Optional 1 or 2 MPa pressure ranges. Piping directions can be rear or bottom, with VCR® and Swagelok® fittings available. ISE80(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.
The ISE80(H) legacy pressure sensor has been updated. Please consider the new ISE20C. Improved features include a new 3-screen, 3-color display and 2 switch outputs plus analog output.
HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 1kW, 2kW, 4kW, 8kW
- Temperature range setting: -20 to 40°C, 20 to 90°C, -20 to 90°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
- Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
- Circulating fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
In order to optimize wafer processing and deposit removal, the temperature in each chamber (especially the process chamber) is precisely controlled. SMC products such as the VDW / VX2 series 2-port solenoid process valves for water, PF3W series digital flow switches for water, and the ISE80 digital pressure switch work together to properly control and measure the cooling water critical to the process. High performance thermo-chillers like our HRZ series are used to cool and maintain the chamber temperatures to within ±0.1 °C.
Transfer Line (Vacuum Chambers)
XGT High Vacuum Slit Valve
ZSE80 Digital Pressure Switch
彩票大赢家ZSE80(F) is a digital vacuum sensor with a 4 digit, 2 color display, compatible with compressed air and non-corrosive liquids. Instantaneous readings are shown in red or green, or shifted from one to the other to alert reaching a target condition. Switch outputs are also indicated on the display. Other functions include security, power saving, resolution and stability. Piping directions can be rear or bottom, with VCR® and Swagelok® fittings available. Both vacuum and compound pressure ranges are offered. ZSE80(F) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.
The ISE80(F) legacy pressure sensor has been updated. Please consider the new ISE20C. Improved features include a new 3-screen, 3-color display and 2 switch outputs plus analog output.
CYV Vacuum Rodless Cylinder
With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.
彩票大赢家The transfer line moves the wafer through a series of chambers for processing. In each chamber the vacuum and atmosphere are divided by either a XGT slit valve or XGD door valve. As the wafer moves between chambers, the chamber is exhausted with a vacuum pump in order to maintain vacuum pressure. Vacuum pressure is precisely monitored by the ZSE80 digital pressure switch. Wafer transfer inside the transfer chamber is enabled via a CYV vacuum rodless cylinder.
Process Chamber Exhaust Line
XLH Manual High Vacuum Angle Valve
彩票大赢家 High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLC High Vacuum Double Acting Valve
XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
XLF High Vacuum Rubber Seal Valve
彩票大赢家XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
彩票大赢家The process chamber exhaust line has an XLH manual high vacuum angle valve between a dry vacuum pump and a turbo-molecular pump. There is another XLC high vacuum double acting angle valve between the turbo-molecular pump and the process chamber. When these valves are closed, vacuum is maintained in the process chamber and maintenance can be performed on the pumps. The process “reaction” gas can also be introduced to the process chamber by closing these valves.
Load-lock Chamber Exhaust Line
XLD High Vacuum Smooth Exhaust Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLA High Vacuum Angle Valve
彩票大赢家Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens when pressure is applied at the pilot port. The bellows assembly can be replaced, reducing maintenance costs and waste materials. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows. Numerous seal materials are available for a wide range of chmical compatibility.
XLF High Vacuum Rubber Seal Valve
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
The load-lock chamber exhaust line is used to evacuate the transfer and load-lock chambers. The load-lock chamber is restored to atmospheric pressure temporarily while a wafer is introduced. After introduction of the wafer, air is exhausted with a dry vacuum pump. When the pressure is reduced to a certain point, the turbo-molecular pump is used for exhaust. A bypass circuit is provided with an XLD high vacuum smooth exhaust valve and a high vacuum angle valve (XLA / XLF).
High Purity Fluoropolymer
LQ3 Fluoropolymer Fittings
SMC high purity Hyperflare™ Fitting series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
LVQ 2 Port Chemical Valve
彩票大赢家 Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.
PA3300 Process Pump
彩票大赢家 Series PA is a double acting, compact, large capacity diaphragm pump suitable for transfer and recovery of a wide variety of fluids. The PA series is available in 3 types; automatically operated, air operated or automatically operated with a built-in pulsation attenuator.